NTEK LITHO | Machine For Sale

Nikon NSR-2005i8a

S/N: 803001

Nikon NSR-2005i8a Machine For Sale


This Nikon NSR-2005i8A i-line stepper delivers dependable 0.5µm resolution and is optimised for 6-inch wafer processing. A trusted platform within legacy semiconductor manufacturing, it provides stable and repeatable patterning for mature production nodes.

  • Date of Manufacture: 01 August 1991
  • Serial Number: 803001
  • Resolution: 0.5µm
  • Computer Type: PDP11
  • Rentical Size: 5 Inch
  • Field Sizes: 15 / 17.5 / 20mm
  • Wafer Size: 6 Inch Flat
  • Reticle Libraries: 1
  • Wafer Loader: Type 1
  • Wafer Loader Pre-alignment 2: Yes
  • Barcode Reader: Yes
  • Wafer Loader Indexers: 2
  • FIA: Yes
  • LSA: Yes
  • LIA: Yes
  • Autofocus: Single Point
  • Levelling: Yes
  • Chuck Type: Ceramic Ring Chuck
  • Water Stage: Ballscrew
  • MCS2 Version: 2.4B
  • PPD: No

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