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Semiconductor Parts

Minimising downtime with

Over 1500 Spare Semiconductor Parts


Ntek Litho's state-of-the-art facility is home to more than 1500 spare semiconductor parts, including but not limited to: lasers, amps, power supplies, ceramics, OPD screens, optics, ITV screens, and much more.

We stock an extensive range of parts from various tooling, ranging from i8 to i14. Need a part? Then contact us below...

NTEK Litho have been a reliable partner when sourcing critical lithography spare parts. Their team quickly identified the components we needed for our Nikon stepper systems and ensured fast delivery, helping us minimise downtime in our fab.

— Semiconductor Manufacturing Client

Request your Parts

If you have any general questions or are looking for a specific machine parts please let us know and our team will get back to you with details of availability and cost.

Got Questions? We Have Answers

Frenquently Asked Questions

NTEK Litho supplies a wide range of spare and replacement parts for Nikon photolithography systems, including components for G-line, i-line and DUV steppers and scanners used in semiconductor fabrication.

Yes. We support both legacy and modern Nikon lithography equipment, helping semiconductor manufacturers maintain and extend the life of their existing tools.

We offer a combination of new, refurbished and second-source components, depending on availability and the requirements of your equipment.

Absolutely. If you’re unsure of the exact part number, our experienced team can help identify the correct component based on your equipment model and requirements.

Yes. NTEK Litho supplies parts to semiconductor facilities worldwide, supporting fabs across Europe, Asia and North America.

Availability depends on the specific component, but we maintain an extensive stock of Nikon stepper and scanner parts to enable fast turnaround times.

Yes. Many customers combine parts supply with our engineering services such as installation, refurbishment, maintenance or lens optimisation to keep equipment operating at peak performance.

Simply contact our team with the part number or equipment details and we’ll confirm availability, pricing and delivery options.