- SF130/SF140: 8-inch notch
- i14E/i14E2: 4 to 6-inch Jeida, 6-inch Jeida to 8-inch notch
- i11D, i14E: changed left to right in-line.
- i11C, i11D: WL2 6-inch Jeida to 8-inch notch, and 8-inch notch to 4-inch flat silicon carbide.
- i11D-WL2: 6-inch flat to 6-inch flat Keyence to accommodate SiC substrate.
- i12D: 6-inch to 5-inch reticle loader conversion.
- i9C/i10C: 8-inch notch to 3-inch, 4-inch and 6-inch flat silicon carbide.
Refurbishments & Conversions
Ntek Litho offers refurbishment services to ensure tools run at optimum performance and OEM specifications. Our refurbishment process includes; replacement of illumination optics, full pneumatic re-hosing, lens optimisation and more.
- Wafer loader & Retical Loader Conversions
- Illumination & BMU Refurbishments
- In-Line conversions
NTEK Litho refurbished one of our Nikon stepper systems and the results exceeded expectations. The tool returned to service performing reliably and has extended the lifespan of our production equipment.
— Semiconductor Manufacturing Client
How We Can Help
BMUs & Illuminators
We fully refurbish BMUs and illuminators to increase power back to an optimal range and improved the uniformity using our own optics and RPF filters.
Active Collaboration
We actively collaborate with all the main brokers to refurbish tools, increasing value to the maximum, and extending the life of degraded equipment.
Our Guarantee
Our proven process guarantees a top-quality, fully refurbished tool delivered to your site with ongoing support available.
Our fully refurbished process includes conversions of Wafer loaders and reticle loaders, meeting your company's required configurations. All aspects of our refurbishment can also be requested individually to tailor to your requirements.
Included but not limited to
Examples of Previously Refurbished Units
i8A, i9C, i10C, i11C, i11D, 4425i, i12D, EX12B, i14E/E2, EX14, SF Series to SF140, S203B and S204B.
Conversions
We will modify and upgrade the components of your machine, which will allow for cost-efficient adaptability to tailor your machinery to your specific product. This significantly improves your company's efficiency and productivity, creating additional benefits for your business.
At Ntek Litho, we complete wafer size conversions on all steppers and scanners from body G6 - S204 to suit your product wafer size and substrate requirements, including SF series, tools up to SF140, as well as reticle size conversions on all steppers from G6 up to i12D.
Examples of completed conversions:
Got Questions? We Have Answers
Frenquently Asked Questions
What does semiconductor equipment refurbishment involve?
Refurbishment involves restoring lithography equipment to optimal working condition through detailed inspection, repair, replacement of components and system recalibration.
Which equipment can NTEK Litho refurbish?
We specialise in refurbishing Nikon photolithography systems including G-line, i-line and DUV steppers and scanners, along with associated laser systems and key components.
Why should equipment be refurbished instead of replaced?
Refurbishment can significantly extend the operational life of existing tools, providing a cost-effective alternative to purchasing new equipment while maintaining reliable performance.
What does the refurbishment process include?
Our refurbishment process typically includes full system inspection, component replacement where necessary, cleaning, recalibration and performance testing to ensure the tool operates correctly.
Can refurbished equipment achieve high performance standards?
Yes. When completed by experienced engineers, refurbishment can restore systems to excellent operating condition, allowing facilities to continue using proven tools with confidence.
Do you refurbish legacy lithography systems?
Yes. Our team has extensive experience working with legacy Nikon systems that remain critical to many semiconductor production environments.
Can refurbishment be combined with other services?
Absolutely. Many customers combine refurbishment with installation, lens optimisation or preventative maintenance to ensure tools perform at their best after restoration.
Do you provide refurbishment for relocated equipment?
Yes. Tools that have been decommissioned or relocated can be refurbished before being recommissioned at a new facility.
How long does the refurbishment process take?
The timeline varies depending on the system condition and scope of work. Our engineers will assess the equipment and provide a clear refurbishment plan and schedule.
How do I arrange an equipment refurbishment?
Contact our team with details of your lithography system and requirements, and we’ll provide a tailored refurbishment solution.
Trusted By
